Spin Coater

 Vacuum chuck with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" square

· One oil-less pump for the vacuum chuck is included and controlled by the spin coater

· Spin speed: 300 - 3000 rpm adjustable

· For safety concerns, the speed is recommended to be limited to 2000 rpm for wafers larger than 8"

 Spray Nozzle

 · One ultrasonic generator with two ultrasonic sprays nozzles with compressed air shaper is included

· Two spray nozzles with the KF-25 adapter are included. (Click the first picture from the right to see details)

o One cylindrical type -- narrower spray ~20 mm diameter

o One cone type -- wider spray ~40 mm diameter

· Recommended compressed air pressure for the aqueous solution: ~2 psi

· One flow meter is integrated for regulating and monitoring the compressed airflow

· Fluid viscosity range: 1 - 50 mPa·s (cP)

· One swing arm for mounting ultrasonic spray head is built-in with adjustable speed and movement range

· Low-cost compressive gas atomizing nozzle is available upon request 

·                    

Heatable Syringe Pump

 · A heatable syringe pump with LCD touch screen control is included for delivering liquid to the ultrasonic nozzle

· One 20 mL syringe is included for immediate use. The unit can accommodate a syringe with a 0.4 - 30 mm diameter

· Pumping rate: 0.001 - 20 mm/min adjustable

· A flexible Polyimide heater with 30 segments programmable temperature controller is built-in for heating up to 75 °C

Heat Lamp and Control

· Dual heat lamps (1000 W max power. Up to 80 ºC) with thermocouple and temperature controller can be ordered at extra cost for the heating substrate by radiation (up to 65 ºC with 12" metal substrate) 

Utility Requirement

· Power: 208 - 240 VAC, 50/60 Hz, 3000 W in total

· Gas: ~2 psi compressed air for the ultrasonic nozzle. Air compressor is also available for order at MG

· Attention: If a gas cylinder is used instead of an air compressor, a two-stage pressure regulator must be installed on the gas cylinder to limit the pressure within the required working range for safe operation. 

Net Weight

· 160 lbs

Shipping Weight & Dimensions

1. 425 lbs, 48"x40"x42"

2. 255 lbs, 48"x40"x40"

3. 155 lbs, 48"x40"x35"

Compliance

· CE Certified

· NRTL certification is only available with compressive gas atomizing spray nozzle 

Warranty

· One year limited with lifetime support

· Rusting and damage due to improper storage condition or maintenance are not covered by warranty